Abstract
Surface X-ray diffraction technique is a non-destructive, non-contact method to study surface/interface structure in 10pm resolution. Its application to wide variety of surfaces/interfaces is, however, hampered by the difficulty of the analysis. We have developed a Bayesian inference method to obtain the structural models that are physically reasonable as well as reproduce the diffraction data. The performance of the new method is demonstrated on epitaxial interface of transition metal oxides.