Electro-Optic Modulator Based on Photolithography Fabricated p-i-n Integrated Photonic Crystal Nanocavity

Nurul Ashikin Binti DAUD; Yuta OOKA; Tomohisa TABATA; Tomohiro TETSUMOTO; Takasumi TANABE

doi:10.1587/transele.E100.C.670

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Electro-Optic Modulator Based on Photolithography Fabricated p-i-n Integrated Photonic Crystal Nanocavity

Nurul Ashikin Binti DAUD, Yuta OOKA, Tomohisa TABATA, Tomohiro TETSUMOTO, Takasumi TANABE

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Keywords: photonic crystal, electro-optic devices, integrated optics, modulators, nanophotonics, opto-electronics

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2017 Volume E100.C Issue 8 Pages 670-674

DOI https://doi.org/10.1587/transele.E100.C.670

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Abstract

We present the first demonstration of an electro-optic modulator based on a photolithographically fabricated photonic crystal (PhC) nanocavity with a p-i-n junction with SiO₂ cladding. We show that the device exhibits an ultrahigh quality factor (Q∼10⁵) and allow us to demonstrate electro-optic modulation through the integrated p-i-n diode structure. We demonstrate an electro-optic modulation based on the carrier injection.

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