IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Distinguished Papers in Photonics
Growth Mechanism of Polar-Plane-Free Faceted InGaN Quantum Wells
Yoshinobu MATSUDAMitsuru FUNATOYoichi KAWAKAMI
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2018 Volume E101.C Issue 7 Pages 532-536

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Abstract

The growth mechanisms of three-dimensionally (3D) faceted InGaN quantum wells (QWs) on (1122) GaN substrates are discussed. The structure is composed of (1122), {1101}, and {1100} planes, and the cross sectional shape is similar to that of 3D QWs on (0001). However, the 3D QWs on (1122) and (0001) show quite different inter-facet variation of In compositions. To clarify this observation, the local thicknesses of constituent InN and GaN on the 3D GaN are fitted with a formula derived from the diffusion equation. It is suggested that the difference in the In incorporation efficiency of each crystallographic plane strongly affects the surface In adatom migration.

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© 2018 The Institute of Electronics, Information and Communication Engineers
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