Fabrication of the Flexible Dual-Gate OFET Based Organic Pressure Sensor

Tatsuya ISHIKAWA; Heisuke SAKAI; Hideyuki MURATA

doi:10.1587/transele.2018OMS0013

Special Section on Recent Progress in Organic Molecular Electronics and Biotechnology

Fabrication of the Flexible Dual-Gate OFET Based Organic Pressure Sensor

Tatsuya ISHIKAWA, Heisuke SAKAI, Hideyuki MURATA

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Keywords: flexible substrate, pressure sensor, organic field-effect transistor, P(VDF/TrFE), dual-gate organic transistor

JOURNAL RESTRICTED ACCESS

2019 Volume E102.C Issue 2 Pages 188-191

DOI https://doi.org/10.1587/transele.2018OMS0013

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Abstract

We have developed the flexible dual-gate OFET based pressure sensor using a thin polyethylene naphthalate (PEN, 25 µm) film as a substrate. The performance was equivalent to that fabricated on the glass substrate, and it could also be used on the curved surface. Drain current in the flexible pressure sensor was increased according to the pressure load without application of gate voltage. The magnitude of the change in drain current with respect to pressure application was about 2.5 times larger than that for the device on the glass substrate.

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