Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

Kenta MIURA; Hiroki MIYAZAKI; Osamu HANAIZUMI

doi:10.1093/ietele/e91-c.10.1669

Special Section on Functional Thin Films for Optical Applications

Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

Kenta MIURA, Hiroki MIYAZAKI, Osamu HANAIZUMI

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Keywords: tantalum oxide, sputtering, annealing, blue-light emission

JOURNAL RESTRICTED ACCESS

2008 Volume E91.C Issue 10 Pages 1669-1672

DOI https://doi.org/10.1093/ietele/e91-c.10.1669

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Abstract

We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600°C for 20min, and the peak wavelength was approximately 430nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta₂O₅/SiO₂ multilayered photonic crystals.

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