IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Functional Thin Films for Optical Applications
Indirectly Reactive Sputtering Coater for High Quality Optical Coatings
Kei-ichi C. NAMIKIXinbin CHENGHaruo TAKAHASHI
Author information
JOURNAL RESTRICTED ACCESS

2008 Volume E91.C Issue 10 Pages 1673-1674

Details
Abstract

An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antirefiection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.

Content from these authors
© 2008 The Institute of Electronics, Information and Communication Engineers
Previous article Next article
feedback
Top