Indirectly Reactive Sputtering Coater for High Quality Optical Coatings

Kei-ichi C. NAMIKI; Xinbin CHENG; Haruo TAKAHASHI

doi:10.1093/ietele/e91-c.10.1673

Special Section on Functional Thin Films for Optical Applications

Indirectly Reactive Sputtering Coater for High Quality Optical Coatings

Kei-ichi C. NAMIKI, Xinbin CHENG, Haruo TAKAHASHI

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Keywords: indirectly reactive sputtering coater, discrete multilayer filter, Rugate filter, broadband AR coating, RGB minus filter

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2008 Volume E91.C Issue 10 Pages 1673-1674

DOI https://doi.org/10.1093/ietele/e91-c.10.1673

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Abstract

An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antirefiection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.

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