Errors in Pi-Coefficients Due to the Strain Effects in Resistor Stress Sensor on (001) Silicon

Chun-Hyung CHO; Ho-Young CHA

doi:10.1587/transele.E94.C.791

Special Section on Fundamentals and Applications of Advanced Semiconductor Devices

Errors in Pi-Coefficients Due to the Strain Effects in Resistor Stress Sensor on (001) Silicon

Chun-Hyung CHO, Ho-Young CHA

著者情報

キーワード: stress sensor, strain effects, (001) silicon, piezoresistive coefficients

ジャーナル認証あり

2011 年 E94.C 巻 5 号 p. 791-795

DOI https://doi.org/10.1587/transele.E94.C.791

詳細

抄録

This work focuses on a study of strain effects in resistor stress sensors fabricated on (001) silicon and their influences on the determination of piezoresistive (pi) coefficients for the precise measurements of die stresses in electronic packages. We obtained the corrected values of the pi-coefficients by considering the strain effects, without which more than 50% discrepancies may be induced.

責任著者(Corresponding author)

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