2019 年 62 巻 5 号 p. 288-293
This review reports many aspects of existing issues and its solutions in a RGA sensor head in detail. The issues that disturb RGA performances can be categorized into four different groups based on their phenomena. The first one is thermal desorption mainly from ion source. The second is electron stimulated gas desorption from the anode surface in the ion source, from the envelope inner surface around the ion source and from the electron multiplier surface of the detector. The third is ion stimulated desorption from the ion extraction plate. The fourth is ion sputtering and film deposition both in the ion source and around the electron multiplier. In this review, important operational parameters and other points which affect RGA performances and measurement results are also discussed.
