特集「Society 5.0時代を創出する異種材料集積半導体デバイス」
Society 5.0実現に向けた異種材料集積シリコンフォトニクス
2021 年 64 巻 2 号 p. 68-73
詳細
2021 年 64 巻 2 号 p. 68-73
Si photonics based on heterogeneous integration will play an important role in Society 5.0. In particular, an optical phase shifter is an essential building block for high-speed optical interconnection. We have developed efficient and low-loss optical phase shifter using a III-V/Si hybrid metal-oxide-semiconductor (MOS) capacitor. We have also applied a hybrid MOS optical phase shifter to realize a programmable photonic integrated circuit for deep learning accelerator.
