X-Ray Reflection Tomography Reconstruction for Surface Imaging: Simulation Versus Experiment

抄録

In this paper, we report the feasibility of X-ray reflection tomography to image patterned surfaces via simulation and experiment. In the simulation work, we were able to obtain very good reconstructed images from reflectivity projections with high correlation coefficient values obtained. Even with just 18 projections with a sinusoidal filter in the reconstruction algorithm, a high degree of colocalization was achieved. The spatial resolution obtained is 200 μm for a 24 μm detector resolution. Experimentally, we were able to obtain a successful reconstruction from at most 36 projections using an ordinary lab-source X-ray reflectivity set-up. Correlation coefficient values obtained are acceptable and yet can still be improved by upgrade of instrumentation design and the need for further mathematical processes in the FBP reconstruction algorithm. Spatial resolution currently obtained is ∼1.6 mm. Further improvements are being done to have a comparable resolution with that of simulation.