JSAP Annual Meetings Extended Abstracts

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The 61st JSAP Spring Meeting 2014

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Photo-Patternable Materials for Low Temperature Bonding and Thick Microfluidic Channel Fabrication

Katsuhiko Hieda, Hiroshi Yamaguchi, Zen Komiya, Tomokazu Miyazaki, Sar ...

Session ID: 18p-E14-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2751

CONFERENCE PROCEEDINGS FREE ACCESS

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PDMS-made Bacteria Trapping Chip using Beads

Ryuhei Hayashi, Hirokazu Nakazawa, Yuusuke Nishimura, Makoto Ishida, K ...

Session ID: 18p-E14-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2752

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Improvement of Fluorescence Detection Sensitivity for Bacterial Sensor using Microbeads

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Session ID: 18p-E14-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2753

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Study of High-Strength Bonding in Low-Temperature Chip Direct Bonding

Yun Liu, Hideki Nagai, Katsuyuki Utaka, Yuichi Matsushima, Takashi Kas ...

Session ID: 18p-E14-9
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2754

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A Truly Compact LED induced Fluorescence Detection Module

Toshihiro Kamei, Keiko Sumitomo, Noriyuki Tsujimura, Takeshi Kobayashi ...

Session ID: 18p-E14-10
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2755

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Pattern Size Dependence of Anisotropic Biaxial Stresses in Strained Si Using Surface Enhanced Raman Scattering

Ryuhei Iwasaki, Kohki Nagata, Daisuke Kosemura, Atsushi Ogura

Session ID: 18p-E14-11
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2756

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Reduction of SiO₂ mixed with sugar by H-radical generated from thermal plasma

Yuji Okamoto, Yoshikazu Suzuki, Hideomi Koinuma, Masatomo Sumiya

Session ID: 18p-E14-12
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2757

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Raman analysis of the surface strain in transistor channels using localized plasmon resonance

Takahiro Kijima, Daisuke Kosemura, Siti Norhidayah Mohd Yusoff, Shouta ...

Session ID: 18p-E14-13
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2758

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Thermodynamics of carbothermic reduction for solar grade silicon

Kenji Itaka

Session ID: 18p-E14-14
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2759

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Exploration of catalysts for solar grade silica reduction process

Takuya Ogasawara, Abd Erahamane Boucetta, Hiroyuki Sato, Yasubumi Furu ...

Session ID: 18p-E14-15
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2760

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Laser Transfer of BST Thin Film to LiNbO₃ Substrate

Tetsuo Samoto, Kosuke Hikichi, Hideki Hirano, Shuji Tanaka

Session ID: 18p-E14-16
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2761

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Morphological effect of Sn during Ge_1-xSn_x molecular beam epitaxy on Ge(111)

Hiromu Hamasaki, Syoichi Kabuyanagi, Tomonori Nishimura, Kosuke Nagash ...

Session ID: 18p-E14-17
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2762

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Annealing temperature dependence of SAB based Si/Si junctions

Masashi Morimoto, J Laing, S Nishida, N Shigekawa, Li Chai, K Takemura ...

Session ID: 18p-E14-18
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2763

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Theoretical Study of Deposition of Etchant Species in Silicon-dioxide Etching Process via Quantum Chemical Molecular Dynamics Method

Hiroshi Ito, Takuya Kuwahara, Yuji Higuchi, Nobuki Ozawa, Seiji Samuka ...

Session ID: 18p-E14-19
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2764

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Deposition of thin Si, Ge, and SiGe films using nanocryatalline silicon ballistic electron emitter

Ryutaro Suda, Mamiko Yagi, Akira Kojima, Mentek Romain, Jun-ichi Shira ...

Session ID: 18p-E14-20
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2765

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Effect Analysis of Size Fluctuation of the Fine Line-patterns Buckling

Keisuke Unosawa, Sachiyo Ito, Keiji Suzuki

Session ID: 18p-E14-21
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2766

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Preparation of hydrogenated amorphous silicon films by the atmospheric pressure CVD using liquid cyclopentasilane

Hideyuki Takagishi, Zhongrong Shen, Takashi Masuda, Keisuke Ohdaira, T ...

Session ID: 19a-E14-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2767

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Crystallization of Amorphous Silicon Thin Films by Microwave Heating

Tomohiko Nakamura, Shinya Yoshidomi, Masahiko Hasumi, Toshiyuki Samesh ...

Session ID: 19a-E14-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2768

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Temperature Analysis of Si Films during Blue Multi-Laser Diode Annealing

Tatsuya Okada, Takayuki Oda, Miyu Uehara, Takashi Noguchi

Session ID: 19a-E14-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2769

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Fabrication of high mobility poly-Si TFT using Blue-Multi-Laser-Diode Annealing

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Session ID: 19a-E14-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2770

CONFERENCE PROCEEDINGS FREE ACCESS

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Leakage Current Characteristics of Poly-Si TFTs fabricated with Double-Line Beam Continuous-Wave Laser Lateral Crystallization

Masayuki Yamano, Shin-Ichiro Kuroki, Tadashi Sato, Koji Kotani, Takama ...

Session ID: 19a-E14-5
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2771

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Curvature Analysis of Glass Substrate during Millisecond Annealing Induced by Thermal-Plasma-Jet Using Surface Densification Model

Keisuke Tanaka, Shohei Hayashi, Seiichiro Higashi

Session ID: 19a-E14-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2772

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Characteristic Evaluation of TFTs with Conventional and Strip Pattern Crystallized by Atmospheric Micro-Thermal-Plasma-Jet

Seiji Morisaki, Shohei Hayashi, Takahiro Kamikura, Shogo Yamamoto, Mas ...

Session ID: 19a-E14-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2773

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Fabrication of High-Performance n-Channel Silicon Metal-Oxide-Semiconductor Field-Effect Transistors on Glass Substrate by Using Meniscus-Force-Mediated Local Layer Transfer Technique

Muneki Akazawa, Kohei Sakaike, Shogo Nakamura, Seiichiro Higashi

Session ID: 19a-E14-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2774

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Minimal Fab and Mega Fab Hybrid Process for Devices Fabrication

Sommawan Khumpuang, Masayoshi Nagao, Takashi Matsukawa, Kazuhiko Endo, ...

Session ID: 19a-E14-9
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2775

CONFERENCE PROCEEDINGS FREE ACCESS

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Characterization of nMOSFET and MOS-capacitor Fabricated by Minimal Fab and Mega Fab Hybrid Process

Sommawan Khumpuang, Masayoshi Nagao, Takashi Matsukawa, Kazuhiko Endo, ...

Session ID: 19a-E14-10
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2776

CONFERENCE PROCEEDINGS FREE ACCESS

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Process Integration of MOSFETs Fabricated by Full MINIMAL Equipment

Fumito Imura, Kazuhiro Koga, Hitoshi Asano, Sommawan Khumpuang, Shiro ...

Session ID: 19p-E14-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2777

CONFERENCE PROCEEDINGS FREE ACCESS

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Characterization of pn diodes and MOS capacitors fabricated by minimal machines

Hitoshi Asano, Fumito Imura, Kazuhiro Koga, Sommawan Khumpuang, Shiro ...

Session ID: 19p-E14-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2778

CONFERENCE PROCEEDINGS FREE ACCESS

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Electrical Characteristics of MOSFETs Fabricated by Full MINIMAL Equipment

Fumito Imura, Kazuhiro Koga, Hitoshi Asano, Sommawan Khumpuang, Shiro ...

Session ID: 19p-E14-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2779

CONFERENCE PROCEEDINGS FREE ACCESS

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Cleanroom-Free Minimal Air Circulation System for PLAD (II)

Takashi Yajima, Masaharu Yasui, Sommawan Khumpuang, Hitoshi Maekawa, S ...

Session ID: 19p-E14-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2780

CONFERENCE PROCEEDINGS FREE ACCESS

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Development of Wafer Transfer System for Vacuum Process in the Minimalfab

Hitoshi Maekawa, Shinichi Imai, Sommawan Khumpuang, Shiro Hara

Session ID: 19p-E14-5
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2781

CONFERENCE PROCEEDINGS FREE ACCESS

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The Wafer Cleaning Process in the minimal

Shuuji Okuda, Sonoko Matsuda, Akihiro Goto, Sommawan Khumpuang, Shiro ...

Session ID: 19p-E14-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2782

CONFERENCE PROCEEDINGS FREE ACCESS

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Cleaning process for contaminated wafer using MINIMAL Piranha Solution

Sonoko Matsuda, Akihiro Goto, Shuuji Okuda, Sommawan Khumpuang, Shiro ...

Session ID: 19p-E14-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2783

CONFERENCE PROCEEDINGS FREE ACCESS

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Exposure properties of a minimal Mask-aligner

Norio Umeyama, Yoshiki Inuzuka, Sommawan Khumpuang, Shiro Hara

Session ID: 19p-E14-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2784

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Superimposing accuracy in Minimal Mask-less Exposure System

Yuuji Kitayama, Yousuke Tanaka, Ryouichi Irita, Kenji Miyake, Sommawan ...

Session ID: 19p-E14-9
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2785

CONFERENCE PROCEEDINGS FREE ACCESS

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Formation of slip dislocation by rapid heating in minimal heating equipment

Haruki Toonoe, Takashi Yajima, Yuuki Ishida, Shinichi Ikeda, Sommawan ...

Session ID: 19p-E14-10
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2786

CONFERENCE PROCEEDINGS FREE ACCESS

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Silicon Thermal Oxidation Process using Minimal Focused Light Heating Furnace

Noriko Miura, Takeshi Aizawa, Takanori Mikahara, Takeshi Yamada, Yasuh ...

Session ID: 19p-E14-11
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2787

CONFERENCE PROCEEDINGS FREE ACCESS

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Electric properties of thermal oxide formed by minimal resistance furnace

Katsuhiko Nakato, hitoshi Asano, Sinnosuke Suzuki, Shogo Matsuda, Ayam ...

Session ID: 19p-E14-12
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2788

CONFERENCE PROCEEDINGS FREE ACCESS

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Minimal Spin-on dopant process

Kazuhiro Koga, Norio Umeyama, Fumito Imura, Hitoshi Asano, Haruki Toon ...

Session ID: 19p-E14-13
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2789

CONFERENCE PROCEEDINGS FREE ACCESS

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Minimal System of Micro-Plasma Etcher Equipment(II)

Hiroyuki Tanaka, Shizuka Nakano, Yoshiki Shimizu, Hisato Ogiso, Shinji ...

Session ID: 19p-E14-14
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2790

CONFERENCE PROCEEDINGS FREE ACCESS

Download PDF (538K)
The depositional performance of the Al thin film in Minimal Sputtering System

Akihiko Katou, Hisato Ogiso, Shizuka Nakano, Yuuki Yabuta, Sommawan Kh ...

Session ID: 19p-E14-15
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2791

CONFERENCE PROCEEDINGS FREE ACCESS

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Half-Inch Silicon CVD Reactor Using Concentrated Infrared Light Heater(2)

Ning Li, Hitoshi Habuka, Shin-ichi Ikeda, Yuuku Ishida, Shiro Hara

Session ID: 19p-E14-16
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2792

CONFERENCE PROCEEDINGS FREE ACCESS

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Silicon Film Growth by the Minimal CVD Process

Shinichi Ikeda, Yuki Ishida, Takanori Mikahara, Katsuhiko Nakato, Hito ...

Session ID: 19p-E14-17
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2793

CONFERENCE PROCEEDINGS FREE ACCESS

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Polish uniformity for Si and SiO₂ using a minimal CMP machine

Norio Umeyama, Kazutaka Shibuya, Yoshio Nakamura, Kouichiro Ichikawa, ...

Session ID: 19p-E14-18
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2794

CONFERENCE PROCEEDINGS FREE ACCESS

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Room temperature ultrasonic bonding process for minimal wafer bonding system

Kazuhiro Noda, Seiya Nakai, Takanori Shuto, Keiichiro Iwanabe, Tanemas ...

Session ID: 19p-E14-19
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2795

CONFERENCE PROCEEDINGS FREE ACCESS

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Wafer thinning process with minimal back grinder

Suzuki Masaaki, Miura Osamu, Ito Noriko

Session ID: 19p-E14-20
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2796

CONFERENCE PROCEEDINGS FREE ACCESS

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Development of a 3D-IC Tester for Minimal 3D-IC Fab

Naoya Watanabe, Kenji Kawano, Michiyuki Eto, Shiro Hara, Masahiro Aoya ...

Session ID: 19p-E14-21
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2797

CONFERENCE PROCEEDINGS FREE ACCESS

Download PDF (725K)
A Design of Sub-1G MEMS Accelerometer

Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroyuki Ito, N ...

Session ID: 19p-PG3-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2798

CONFERENCE PROCEEDINGS FREE ACCESS

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A Dual-Axis MEMS Sensor for An Arrayed MEMS Accelerometer

Takaaki Matsushima, Toshifumi Konishi, Daisuke Yamane, Hiroyuki Ito, N ...

Session ID: 19p-PG3-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2799

CONFERENCE PROCEEDINGS FREE ACCESS

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A Study on an Energy Harvesting Device(2)

Ken Kagaya, Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Hir ...

Session ID: 19p-PG3-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2800

CONFERENCE PROCEEDINGS FREE ACCESS

Download PDF (388K)

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