JSAP Annual Meetings Extended Abstracts

The 61st JSAP Spring Meeting 2014

Displaying 2651-2700 of 3867 articles from this issue

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Local Electrical Properties of Mn-Nanodots embedded SiOx MIM Diodes by Atomic Force Microscopy Using a Conducting Probe

Takashi Arai, Chong Liu, Akio Ohta, Katsunori Makihara, seiichi Miyaza ...

Session ID: 18p-PA11-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2651

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Effects of Avalanche Multiplication on Photovoltatic Property of Nanocrystalline Silicon

Nobuya Mori, Nobuyoshi Koshida

Session ID: 18p-PA11-5
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2652

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Atomistic Simulation of Electron Mobility in Ge Nanowires

Kenta Shimoida, Noriyasu Mori, Hideaki Tsuchiya, Yoshinari Kamakura, N ...

Session ID: 18p-PA11-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2653

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Simulation of Transient Characteristics of Self-Heating Effect in Small FETs

Yoshinari Kamakura, Kentaro Kukita, Indra Nur Adisusilo, Go Wakimura, ...

Session ID: 18p-PA11-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2654

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Simulation of Gate-Oxide thickness dependence for Body Short Type Self-bias Channel Diode Characteristics

Daisuke Yamada, Tsugutomo Kudoh, Fumihiko Sugawara

Session ID: 18p-PA11-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2655

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Inhibition of copper dissolution by removal of oxidants from rinsing water using noble metal catalysts

Daisaku Yano, Masami Murayama, Masao Takahashi, Hikaru Kobayashi, Koji ...

Session ID: 19a-D9-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2656

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Molecular Dynamics Analysis on the Microscopic Behavior of Water near SiO₂ Surface

Satoshi Nakaoka, Yasutaka Yamaguchi, Masayuki Kawakami, Daisaku Yano, ...

Session ID: 19a-D9-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2657

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Evaluation Methods for Water Permeation into Fine Pore Patterns

Mieko Kashi, Takuya Kambayashi, Masaki Okawa, Megumi Hamano, Toshinori ...

Session ID: 19a-D9-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2658

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In-line measurement of hydrofluoric acid concentration during SiO2 wet etching

So Takagi, Takuya Onoda, Yoshihiro Mori

Session ID: 19a-D9-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2659

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Comparison of Wetting Properties between GeO₂/Ge and SiO₂/Si at Controlled Relative Humidity by in situ XPS

Kenta Arima, Yoshie Kawai, Yuya Minoura, Yusuke Saito, Daichi Mori, Ke ...

Session ID: 19a-D9-5
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2660

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Effect of Si(100) surface flattening process on device characteristics

Sohya Kudoh, Shun-ichiro Ohmi, Dae-Hee Han, Nithi Atthi

Session ID: 19a-D9-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2661

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Depth profiles of metals gettered by BMDs in silicon substrates

Rikiichi Ohno, Koichiro Saga

Session ID: 19a-D9-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2662

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Theoretical Study of Diffusion Processes at Metal/Semiconductor Interfaces

Tomoki Hiramatsu, Takashi Nakayama

Session ID: 19a-D9-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2663

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New evaluation method for the surface energy of MEMS cantilever

Ichiroh Kato

Session ID: 19a-D9-9
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2664

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EXAFS measurement of encapsulated Bi nanoline in Si

Koichi Murata, Kiyofumi Nitta, Tomoya Uruga, Yasuko Terada, Wataru Yas ...

Session ID: 19a-D9-10
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2665

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Characterization of Electronic Charged States of Self-Aligned Coupled Si Quantum Dots by AFM/KFM Probe Technique

Naoki Tsunekawa, Katsunori Makihara, Mitsuhisa Ikeda, Seiichi Miyazaki

Session ID: 19a-D9-11
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2666

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Laser-assisted Atom Probe Analysis of Carbon-doped Silicon

Teruyuki Kinno, Tomokazu Sasaki, Tadakatsu Ohkubo, Mitsuhiro Tomita, K ...

Session ID: 19a-D9-12
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2667

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Size Effects in Ultraviolet Raman Spectra of Si Nanowires and Ultrathin SOI

Tetsuya Tada, Poborchii Vladimir, Yukinori Morita, Geshev Pavel

Session ID: 19a-D9-13
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2668

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Ab initio analysis on the stability of metal atoms in β-Si3N4/Si structure

Daiki Shibata, Syunsuke Kobayashi, Koji Sueoka, Jun Komachi, Koichiro ...

Session ID: 19p-D9-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2669

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First-principles analysis on stability of contamination metal atoms in β-Si3N4 surface

Syunsuke Kobayashi, Daiki Shibata, Koji Sueoka, Jun Komachi, Koichiro ...

Session ID: 19p-D9-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2670

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Formation of nanocrystalline Si layer and Si micro-hole by using surface structure chemical transfer method

Kentaro Imamura, Daichi Irishika, Tomoki Akai, Hikaru Kobayashi

Session ID: 19p-D9-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2671

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Evaluation of strain in Si using tip-enhanced Raman spectroscopy

Daisuke Kosemura, Motohiro Tomita, Che Mohd Yusoff Siti Norhidayah, Ch ...

Session ID: 19p-D9-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2672

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Excitations of LO/TO Phonons in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy

Shotaro Yamamoto, Daisuke Kosemura, Siti Norhidayah Mohd Yusoff, Takah ...

Session ID: 19p-D9-5
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2673

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Two-dimensional Evaluation of Stress Relaxation Profile in Strained SiGe Nanostructures on Si Substrate by SRRS

Motohiro Tomita, Daisuke Kosemura, Koji Usuda, Atsushi Ogura

Session ID: 19p-D9-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2674

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Study of Current variability depend on Random Dopant Fluctuation in Source and Drain Region

Akito Suzuki, Rika Akutsu, Hiroya Imai, Takefumi Kamioka, Yoshinari Ka ...

Session ID: 19p-D9-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2675

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Hydrogen production from silicon nanoparticles fabricated from silicon swarf

Katsuya Kimura, Masao Takahashi, Yayoi Kanatani, Tohru Higo, Hikaru Ko ...

Session ID: 19p-D9-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2676

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Spatial Variation in Carrier Concentration in Nanocrystal Ni-Si Films Measured by Multimode Scanning Probe Microscopy

Leonid Bolotov, Noriyuki Uchida, Tetsuya Tada, Toshihiko Kanayama

Session ID: 19p-D9-9
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2677

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High Density Formation of Mn and Mn-Germanide Nanodots Induced by Remote Hydrogen Plasma

Yinghui Wen, Katsunori Makihara, Akio Ohta, Mitsuhisa Ikeda, Seichi MI ...

Session ID: 19p-D9-10
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2678

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Characterization of Photoluminescence from P-doped Ge Core Si Quantum Dots

Keigo Kondo, Yoshihisa Suzuki, Katsunori Makihara, Mitsuhisa Ikeda, Ta ...

Session ID: 19p-D9-11
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2679

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Electroluminescence from Multiply-Stacking Valency Controlled Si Quantum Dots

Takahisa Yamada, Katsunori Makihara, Yoshihisa Suzuki, Mitsuhisa Ikeda ...

Session ID: 19p-D9-12
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2680

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Characterization of Electron Emission from High Density Self-aligned Si-based Quantum Dots by Conducting-Probe Atomic Force Microscopy (II)

Daichi Takeuchi, Katsunori Makihara, Akio Ohta, Mitsuhisa Ikeda, Seiic ...

Session ID: 19p-D9-13
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2681

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Effects of laser fluence optical absorption and electric conduction for silicon supersaturated with sulfur by pulsed laser melting method

Katsuki Nagao, Mitsuru Inada, Muneyuki Naitou, Kengo Norimura, Tatsuya ...

Session ID: 19p-D9-14
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2682

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Phase Diagram of Metal Germanide and Schottky Barrier Height at Germanide/Ge Interfaces

Shota Iizuka, Takashi Nakayama

Session ID: 19p-D9-15
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2683

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First Principles Study of the Relation between Schottky-barrier Change and Interface Structure at Sn/Ge Interfaces

Kyosuke Kobinata, Takashi Nakayama

Session ID: 19p-D9-16
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2684

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Universal Estimation of Work Function of Transition Metal Carbides and Nitrides

Michiko Yoshitake

Session ID: 19p-D9-17
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2685

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Effects of Nitrogen Concentration on the Electrical Properties of HfN Gate Insulator Formed by ECR Plasma Sputtering

Elham Heidari, Sohya Koudoh, Nithi Atthi, Dae-Hee Han, Shun-ichiro Ohm ...

Session ID: 19p-D9-18
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2686

CONFERENCE PROCEEDINGS FREE ACCESS

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Impact of Surface Roughness on Thermoelectric Properties of Silicon Nanotubes

Tomofumi Zushi, Cresti Alessandro, Pala Marco, Keisaku Yamada, Takanob ...

Session ID: 20a-D9-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2687

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Effect of Device structure on Mg₂Si-Si Hetero-junction Tunneling FET

Yan Wu, Hiroki Hasegawa, Kuniyuki Kakushima, Takanobu Watanabe, Yoshin ...

Session ID: 20a-D9-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2688

CONFERENCE PROCEEDINGS FREE ACCESS

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Device Simulation of Junction Barrier Schottky Diode

Kazuya Matsuzawa, Masatoshi Abe, Yoshinori Oda, Jun Komachi, Hiroyuki ...

Session ID: 20a-D9-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2689

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Large Scale Parallelized Device Simulation of IGBT

Kiyoshi Ishikawa, Kazuya Matsuzawa, Yoshinori Oda, Hiroo Koshimoto, Ts ...

Session ID: 20a-D9-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2690

CONFERENCE PROCEEDINGS FREE ACCESS

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First-Principles calculations of Schottky barrier heights of Metal/4H-SiC{0001} Interfaces.

Nobuhiko Kato, Kazuki Mori, Satomichi Nishihara, Kazuyuki Okazaki, Hid ...

Session ID: 20a-D9-5
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2691

CONFERENCE PROCEEDINGS FREE ACCESS

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Device simulator developments and applications to SiC devices

Ken Yamaguchi, Takuhito Kuwabara, Hideaki Koike

Session ID: 20a-D9-6
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2692

CONFERENCE PROCEEDINGS FREE ACCESS

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Three-Dimensional Toporaphical Process Simulation Using Geometrical Models

Teppei Tamaki, Takeo Ikezawa, Hideaki Koike

Session ID: 20a-D9-7
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2693

CONFERENCE PROCEEDINGS FREE ACCESS

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Development of Three-dimensional Process Simulator

Shin-ichiro Kobayashi, Teppei Tamaki, Takeo Ikezawa, Hideaki Koike

Session ID: 20a-D9-8
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2694

CONFERENCE PROCEEDINGS FREE ACCESS

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Analysis of Narrow Channel Effect in MOSFETs using Three-dimensional TCAD Simulator

Shin-ichiro Kobayashi, Teppei Tamaki, Achihiro Hmano, Takuhito Kuwabar ...

Session ID: 20a-D9-9
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2695

CONFERENCE PROCEEDINGS FREE ACCESS

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Analysis of IGBT using 3D Process and Device Simulator

Yasuyuki Ookura, Teppei Tamaki, Takeo Ikezawa, Achihiro Hamano, Jun'ic ...

Session ID: 20a-D9-10
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2696

CONFERENCE PROCEEDINGS FREE ACCESS

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Control of dielectric constant of Diamond-Like Carbon Films grown by Photoemission-Assisted Plasma-Enhanced CVD: From Low-k to High-k

Hiroyuki Hayashi, Susumu Takabayashi, Meng Yang, Shuichi Ogawa, Taiich ...

Session ID: 18a-D8-1
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2697

CONFERENCE PROCEEDINGS FREE ACCESS

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Evaluation of short range order in SiO2 thin-film by grazing-incidence wide and small-angle X-ray scattering

Kohki Nagata, Hiroki Tokutake, Masaya Nagasaka, Atsushi Ogura, Ichiro ...

Session ID: 18a-D8-2
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2698

CONFERENCE PROCEEDINGS FREE ACCESS

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Silicon oxide film was formed with mixed silicone-oil and ozone gas at low-temperature

Takuya Ito, Kensuke Nishioka

Session ID: 18a-D8-3
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2699

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Detailed study of the relationship between SiO2 degradation and hydrogen movement using nuclear reaction analysis

Yusuke Higashi, Riichiro Takaishi, Masamichi Suzuki, Koichi Kato, Mits ...

Session ID: 18a-D8-4
Published: March 03, 2014
Released on J-STAGE: July 07, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2014.1.0_2700

CONFERENCE PROCEEDINGS FREE ACCESS

Download PDF (310K)

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