There are many attempts to investigate the fine structure of biological samples under a hydrated state using an X-ray microscope. The X-ray wavelength is very short (2.3-4.4nm: water window), so that the grazing incidence mirrors used in the X-ray microscope system require very smooth surfaces and highly accurate figures. We fabricated smooth and accurate Wolter type I mirrors using a replication method. The replicated mirror showed a surface roughness and a figure error of 1.307nm Ra and 0.19μm peak to valley (PV), respectively. Several mirrors could be successfully fabricated using only one master mandrel in our replication method without destroying the master mandrel.

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