プラズマ・核融合学会誌
Print ISSN : 0918-7928
80 巻, 11 号
選択された号の論文の18件中1~18を表示しています
Rapid Communications
解説
  • 斧 高一
    2004 年80 巻11 号 p. 909-918
    発行日: 2004年
    公開日: 2005/07/14
    ジャーナル フリー
    Plasma processing, such as etching and deposition, is an indispensable processing technique in the fabrication of modern semiconductor microelectronic devices. Nowadays, increasingly strict requirements are being imposed on plasma processing technology, as integrated circuit device dimensions continue to be scaled down. The numerical simulation is strongly required for a better understanding of the physics and chemistry underlying the processing, and for a design of plasma reactors and plasma processes requiring less experimental efforts. This paper presents an on-going study of the plasma simulation for plasma reactors and the process simulation for microstructural features on substrates, in view of the goal to a technology computer-aided design (TCAD) of plasma processing. Attention is placed on etching in parallel-plate radio frequency (rf) and inductively coupled plasmas, with emphasis on the physical and chemical model used in the simulation.
小特集 「球状トカマクの実用炉への展望 -トカマクの低アスペクト比化への挑戦-」
講座 「輸送解析から見た高エネルギー粒子計測手法」
研究論文
  • 後藤 拓也, 小川 雄一
    2004 年80 巻11 号 p. 981-987
    発行日: 2004年
    公開日: 2005/07/14
    ジャーナル フリー
    A system code for designing helical fusion reactors have been developed. A radial build of a helical reactor is considered in the code, and three-dimensional effect of each type helical reactors is reflected by including detail analysis result of them in other study. Sensitivity analysis have held by using the code so as to clarify the physics and engineering issues needed to be solved to design high performance helical fusion reactor. Here we tried to design two types of helical reactors; i.e., an ignition machine and a commercial reactor. If we design an ignition machine with a major radius of 8˜10 m, the improvement of the energy confinement factor of HISS=2.5˜3 might be required. In the commercial helical reactor a high-density/low-temperature operation regime (e.g., ne˜6×1020m-3,Te=8keV)is feasible by improving confinement (HISS=2)and by increasing maximum magnetic field strength (Bmax=20T), while it is not accessible in tokamak reactors due to the limitations of the Greenwald density and the current drive power.
Letters
  • Nobukazu TAKEDA, Kiyoshi SHIBANUMA
    2004 年80 巻11 号 p. 988-990
    発行日: 2004年
    公開日: 2005/07/14
    ジャーナル フリー
    The simplified analytical model of a support structure composed of complicated structures such as multiple flexible plates was proposed for dynamic analysis of the ITER major components of the VV and TF coil. The support structure composed of flexible plates and connection bolts was modeled as a spring model composed of only two spring elements simulating the in-plane and out-of-plane stiffness of the support structure with flexible plates including the effect of connection bolts. The stiffness of both these spring models for the VV and TF coil agree well with that of shell models simulating actual structures such as flexible plates and connection bolts. It is therefore found that the spring model with only these two parameters, in-plane and out-of-plane stiffness, simplifies the complicated support structure with flexible plates for the dynamic analysis of the VV and TF coil. Using the proposed spring model, the dynamic analysis of the VV and TF coil for the ITER were performed to estimate the integrity under the design earthquake at Rokkasho, a candidate for an ITER site. As a result, it is found that the maximum relative displacement of 8.6 mm between the VV and TF coil is much less than the current design gap of 100 mm, so that the integrity of the major components (VV and TF coil) of the ITER tokamak device is ensured for the expected earthquake event.
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