A simplified visualization system for measuring airflow patterns in clean rooms was developed. A tracer of distilled-water droplets with several micron diameter was radiated by a red-colored fluorescent light. The scattered light by the tracer was separated from all lights. And the scattered light was amplified and recorded by a video camera built-in real-time image processing. And this system enables us to visualize the airflow patterns in which there was an obscure contrast between the tracer and the background illumination.
The two-dimensional visualized images were converted into digital image-data, and processed numerically with an image pattern tracking method. The accuracy of the calculated vectors was influenced by the image-contrast. The effect of image-contrast on the accuracy was investigated by processing several images of different contrast. And the air-velocity measured with the image processing was compared with that measured with a laser doppler velocimeter.
From these analyzed results, it was concluded that the image of emphasized contrast enables to calculated exact vectors, air-velocity measured with image processing almost agreed with that measured with a laser doppler velocimeter, and the method was very useful for quantitative evaluation of various airflow patterns in clean rooms.
View full abstract