As for the mass-Spectrometer type vacuum leak detector, the theory of probe method is virtually applied to, and as a result of the above, it is ascertained that the actual measurement is quite coincident to the theoretical equation of minimum detectable leak flow rate.
For tracing any leak Hunting in the Osaka Cyclotron, Shimadzu MS-A type leak detector has been used, and thus in a short time the first Scheduled goal was attained. The leak detector has been attached thereto by means of the backing method, and it proves that the minimum detectable leak flow rate was 1×10
-4 lusec.
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