Evacuating speed of a rotary vacuum pump decreases as pressure decrease, but mathematical expression showing this tendency is unknown. Only the equation
dP/
dt=-So/V (P-P
min) is introduced by experiences, but the physical meaning of P
min (final pressure) is very chaotic.
The author explains this meaning by simple calculation, as P
min is the parameter containing dead space volume, outgassing and leakage.
But unfortunately, as the above equation is not always appropriate for the actual pumps, the author proposes more adequate expression S = {1- (P
min/P)
a} So.
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