For the magnetic lens in the electron microscope, effects of the spherical aberration on the field aberrations are theoretically related.
Consideration for the field aberration constants such as α, β, γ, δ and ε, so-called distortion, curvature of field, astigmatism and coma, respectively, these field aberration constants are to be calculatedas follows:
α=α
P+τ(β
P+γ
P)+τ
2(δ
P+ε
P)+τ
3ζ
β=β
P+4τδ
P(real part)+2τ
2ζ γ=γ
P+2τδ
P+τ
2ζ
δ=δ
P+τζ, ε=2δ
Here, ξ is the spherical aberration constant, the constants noted p refer to the principal electron paths through the focal points and τ is the relative inclination of the given ray to the principal path.
Furthermore, the field aberration constants are numerically calculated respectively by using the case when the field is bell-shaped distribution.
View full abstract