Preprints of Annual Meeting of The Ceramic Society of Japan<br> Preprints of Fall Meeting of The Ceramic Society of Japan

A bioinspired process was employed to control over morphology of TiO₂ films in solutions. By controlling the solution conditions, either pH, temperature or additives, we could regulate the crystallization behavior, so as a various of morphologies could be obtained. The film surface, cross section and crystalline phases were characterized. Our studies show that the optimizing of morphology through such an environmental-benign way is promising to be extended to other materials systems.

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YPO4:Eu2+ nanoparticles were successfully prepared by environmentaly beneign process below 100 C. This nanoparticles emits blue light centered at 370 nm in wavelength.

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Niobium oxide thin films were prepared by sol-gel methods. These films are important materials for the metal insulator metal (MIM) capacitor of giga-bit dynamic random access memory (DRAM). Niobium chloride, which is low cost material, was used as a starting material. And all process carried out in the air atmasphere. The crystalline and transparaent niobium oxide films could be obtained at the sintered temperature of 600 degree centigrade.

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We report the temperature-dependent properties of ferroelectric thin films such as PZT and BZT. The large-signal field-induced strain from the macroscopic capacitor top electrode/ferroelectric film/bottom electrode, and small-signal microscopic PZT or BZT capacitor consisting with probe microscopy tip/PZT or BZT/bottom electrodes. 1μm-thick PZT films on were prepared from Inostek chemical solution. 0.5μm-thick Ba(Zr_0.2Ti_0.8)O₃ (BZT) thin films were prepared on by chemical solution deposition. Measurements of the temperature large-signal electric-field-induced displacements of the films were performed using a combination of scanning probe microscopy (SPM) and a ferroelectric tester. Small-signal measurements were performed using a combination of SPM and a lock-in amplifier. For the temperature-dependent displacement measurement, a stage with a heater and thermocouples were employed. The temperature dependence of large-signal displacement loops of the BZT thin films at -100°C, 20°C and 100°C are measured. And the averaged piezoresponse signal at various temperatures are also measured. At 20°C, piezoresponse signal is most intense. The lower signal at 100°C is due to loss of ferroeletricity, and lower signal at -100°C is partly due to the effect of contraction of ferroelectric domains.

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