Deep ultraviolet (DUV) lasers are widely used in the semiconductor industry. Photolithographic exposure tools typically employ pulsed excimer lasers operating at 10’s of Watts average power, whereas wafer- and mask-inspection applications utilize lower-power, solid-state, continuous-wave (CW) and quasi-continuous-wave (QCW) ultraviolet (UV) lasers based on nonlinear frequency conversion. In this paper, we review recent technology trends of DUV light sources developed for photomask inspection tools.

抄録全体を表示

Confocal microscope system, which has higher resolution than an ordinary microscope, has spectrometric capability with no special optical elements. It is found by calculation that the confocal microscope system with SFS1 lens which has 20.9 aberration number has 0.6 nm spectral resolution. This report describes about some applications of the system.

抄録全体を表示

OBIC (Optical Beam Induced Current) microscope is an application of a scanning laser microscope. It enables to visualize a photo conductivity and/or depletion region of p-n junction in a semiconductor material. This paper briefly reviews the principle of photo current measurement, instrumentation, and some applications. Moreover, spectroscopic OBIC image has been investigated with the specially designed OBIC microscope which can switch the excitation wavelength.

抄録全体を表示

あらゆるタイプの太陽電池セルの変換効率分布を可視化する測定装置を開発した.これは,太陽電池の変換効率に直結する任意バイアス電圧下での電流密度分布を全面可視化するもので,これまでにない新機軸の装置となっている.本稿では,同装置の技術的特徴や開発コンセプトについて紹介する.

抄録全体を表示

Utilizing high-power GaN laser diodes emitting light at 444nm, which have been developed for a blue light source in laser rear projection displays, high-power coherent red light at 639nm, which is also useful for laser rear projection displays, becomes available from Pr³⁺ doped LiYF₄ lasers. In this paper, development of Pr³⁺: LiYF₄ lasers are reviewed. In our experiment, the highest laser power of 112mW was achieved with the optical-optical conversion efficiency of 33.5%. Characteristics of this laser at elevated temperatures were also investigated for practical applications such as a laser projector.

抄録全体を表示

In this paper, oxidation behavior of bare and SiC coated C/C composites and its effect on mechanical properties have been studied experimentaly. It was found in oxidation tests that oxidation of an SiC-coated C/C composite occurred by oxygen diffusion through the cracks of SiC coating and thus the weight loss was concentrated just underneath of the coating cracks. Due to this behavior, bending strength degradation of the SiC-coated C/C composite was found to be more serious than that of the bare C/C composite when the comparison was made under the same weight loss level. In particular, it is noted that the bending strength degradation of the SiC-coated C/C composite is more rapid at higher oxidation temperature even in low weight loss condition. On the other hand, interlaminar shear strength, ILSS, degradation was shown to be higher in case of low oxidation temperature than in high oxidation temperature. This tendency suggests that main source of the bending strength degradation of the SiC-coated C/C composite should not be the matrix damages but fiber damages at least under low weight loss level.

抄録全体を表示

The usefulness was examined of the replica method for observing the shapes of long drill holes several microns in diameter. The results closely agreed with the results of conventional sectional observation. Replicas of multiple drill holes in the same sample can be taken at the same time without the need for specialized techniques, with the process requiring only 10-20 minutes. A laser scanning microscope gives a clear 3D image of the replica. The replica method is thus suitable for the observation and evaluation of long drill holes several microns in diameter.

抄録全体を表示

結晶系太陽電池モジュールの熱疲労寿命を早期に評価するため,急速温度サイクル試験と当該試験環境下での抵抗値の連続測定を行った.その結果,比較的早期に抵抗値の顕著な増大が観察された.また,劣化した試料の解析により,直列抵抗の増大に帰結する劣化要因が確認された.これらにより,本試験法および測定法が,モジュールのはんだ接合部劣化を短期間で検出する方法となる可能性が示された.

抄録全体を表示