The reactivities of Ba
2YCu
3O
7-x with BaZrO
3 and CaSiO
3 were studied to develop a substrate material for superconducting oxide films. It was found that BaZrO
3 and CaSiO
3 were less reactive to Ba
2YCu
3O
7-x and the onset critical temperature of Ba
2YCu
3O
7-x remained unaltered after heating in contact with these materials at 1223K. Although BaZrO
3 was less reactive than CaSiO
3, BaZrO
3 was unsuitable for the substrate of Ba
2YCu
3O
7-x films because of the large difference of the thermal expansion coefficient. On the other hand, the thermal expansion coefficient of CaSiO
3 is almost the same as that of Ba
2YCu
3O
7-x. High-
Tc superconducting oxide films were prepared easily on the CaSiO
3 substrate by the conventional dipping-pyrolysis method. As a result, mixed oxide, CaSiO
3, is one of the promising materials for the substrate of Ba
2YCu
3O
7-x films because of its low cost, low reactivity, and comparable in thermal expansion coefficient.
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