The in-depth distribution of residual stresses in shot-peened steels was measured by using high energy X-rays from a synchrotron radiation source. The relation between the 2θ and sin
2ψ was obtained with the side-inclination method (ψ diffractometer). The distribution of residual stresses was first evaluated by the nonlinearity of the sin
2ψ diagram by a simplex method. The estimated stress agreed with the distribution determined through the sin
2ψ method by using Cr-Kα radiation combined with the conventional surface removal method. A new method was proposed to estimate the stress value of the distributed residual stress. The new method was a combination of the sideinclination method and the iso-inclination method (ω diffractometer) to maintain the penetration depth constant. The sin
2ψ diagram could be approximated by the linear relationship. The evaluated stress distribution agreed well with the distribution obtained by the surface removal method.
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