Dependence of Field Evaporation Voltage on Polarization Angle of Femtosecond Laser in 3D Atom Probe

抄録

Recently, laser pulses on a three-dimensional atom probe have been used to induce field evaporation. The advantages of laser-pulse atom probes are application to higher resistivity materials such as semiconductors and high mass resolution. Early studies of laser-pulse atom probes were performed with laser pulses of nanosecond duration. All evidence from these early studies and most recent studies using sub-picosecond laser pulses have indicated that the field evaporation of atoms by laser pulses occurred by a thermal pulsing mechanism. On the other hand, some recent experiments with sub-picosecond laser pulses have resulted in the proposal of athermal mechanisms (e.g., optical rectification) of field evaporation. Thus, the mechanism of field evaporation at the apex of a needle specimen by sub-picosecond laser pulses has not yet been established. We report the dependence of field evaporation voltage on the polarization angle of femtosecond laser pulses for metal specimens. [DOI: 10.1380/ejssnt.2009.70]