Calculation of Desorption Parameters for Mg/Si(111) System

S. A. Dotsenko; N. G. Galkin; K. N. Galkin

doi:10.1380/ejssnt.2009.816

Conference -JRSSS-8-

Calculation of Desorption Parameters for Mg/Si(111) System

S. A. Dotsenko, N. G. Galkin, K. N. Galkin

著者情報

キーワード: Metallic films, Thermal desorption, Alkaline earth metals, Silicon, Reflection spectroscopy, Magnesium, Desorption parameters, Si(111)

ジャーナルフリー

2009 年 7 巻 p. 816-820

DOI https://doi.org/10.1380/ejssnt.2009.816

詳細

抄録

The method for calculation of desorption parameters developed for differential reflection spectroscopy is presented. It enables to study desorption and to control phase composition of film simultaneously. Spectra of differential reflectance Δ R/R of the film are initial data for the method. The method was used for Mg/Si(111) system. The desorption parameters for bulk Mg film were calculated and limitations of the method were found. [DOI: 10.1380/ejssnt.2009.816]

責任著者(Corresponding author)

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