Characterization of flexible radio-frequency spiral inductors on a plastic substrate

抄録

This paper describes the design and fabrication of flexible radio-frequency inductors integrated on a polyethylene terephthalate substrate. Experimental and modeling results for the RF responses of flexible inductors are reported. Investigations and analysis have been conducted on the effects of layout and process parameters on the frequency responses of inductance, quality factor and self-resonant frequency of the spiral inductors. The influence of bending strain on the performance of spiral inductors is also investigated based on measurement and modeling results. The analysis provides guidelines for designing the flexible spiral inductors towards the flexible monolithic microwave integrated circuits on a plastic substrate.