IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
LETTER
Characterization of surface forces for electro-mechanical memory cells
Woo Young Choi
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ジャーナル フリー

2010 年 7 巻 12 号 p. 827-831

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抄録
By comparing experimental and simulation data, surface forces of electro-mechanical memory cells were characterized. In the case of aluminum beams, surface forces were negligible due to rough surface topology. However, in the case of titanium-nitride beams, surface force density was estimated to be 624kPa. The extracted value of surface force can be fed back into the finite-element-analysis (FEA) simulation for better modeling accuracy.
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© 2010 by The Institute of Electronics, Information and Communication Engineers
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