鉛直振動による浮上を用いた3自由度インチワーム

抄録

We propose a 3-DOF inchworm-type microactuator which uses levitation caused by vertical vibration. The vertical vibration is generated by a piezoelectric actuator. The inchworm usually consists of thrust elements and clamp elements. The proposed inchworm however does not use any clamp elements. Four levitation elements are connected with four thrust elements which are stacked-type piezoelectric actuators. The levitation element consists of a mass, a piezoelectric actuator and a plate. The vertical vibration of the piezoelectric actuator lifts the levitation elements, and eliminates the friction. By controlling the order of the deformation of the horizontal piezoelectric actuators and the vibration of the vertical piezoelectric actuators, the inchworm moves in the linear and rotational directions. The levitation height and the linear and rotational displacement of the inchworm were measured. Experimental results show the feasibility of the proposed 3-DOF inchworm. The mechanism described in this paper is effective in a precise positioning system in a cleanroom.