抄録
Demand for compact and simple sensor with high accuracy in the production line is increasing. A compact sensor using a self-coupling effect of the semiconductor laser has been studied. A measurement method which can detect self-coupling effect from change in terminal voltage of semiconductor laser without photodiode is proposed. It is confirmed that this sensor using terminal voltage change can measure a distance as same as sensor with photodiode. The measurable distance of this sensor is shorter than that with the photodiode. However, this sensor can be used as a shape measuring sensor with high accuracy by closely arranging semiconductor laser in a two-dimensional array.
