強誘電体エピタキシャル薄膜のフレキシブル化プロセスにおける白金バッファ層の効果

抄録

Epitaxial thin films of a ferroelectric perovskite-type oxide grown on single-crystalline SrTiO₃ (100) were transferred onto a flexible printed circuit (FPC). In the case that the thin films were directly adhered onto FPC using a copper foil double-coated conductive adhesive tape (Cu double-sided tape), serious cracking and exfoliation occurred during the transfer process. To avoid these damages, we have tried to insert a metal buffer layer with excellent ductility between the ferroelectric oxide thin film and the Cu double-sided tape. The platinum buffer layer was found to be appropriate to establish a crack- and exfoliation-free transfer process.