抄録
Micro discharge is investigated which is occurred with a pair of electrodes covered with dielectric barrier. The discharge gap is set at an order of micro meters by changing a spacer from 0 to 100μm. Paschen's law states the minimum sparking voltage of various gases for respective discharge gaps in atmospheric pressure.
In this paper, characteristics of micro discharges, such as discharge voltages, discharge currents, discharge power, which is obtained with the help of Lissajous figures, and the relationships between these characteristics are presented. Characteristics of ozone generation and treatment of high concentration NOx, which is contained in exhaust gas of automobiles, are investigated. Byproducts are confirmed by FT-IR and GC-MS.
