Analysis of Thermal Drift of A Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures

抄録

In this paper, a suppression method of generated distortion on the beam structures due to thermal stress is investigated for reduction of remainder thermal drift in three-axis accelerometer for high temperatures. An arrangement of piezoresistors for acceleration detection is presented to further reduction of thermal drift. Thermal drift analysis and design of advanced three-axis accelerometer for high temperatures without temperature dependence has been carried out with the finite element method (FEM) program, ANSYS. Experimental results agreed well with these theoretical results. Design considerations that enable the three-axis accelerometer to have stable sensitivity and offset are described with the simulated results.