特集研究開発レター
PZT Film Formation With Use of Spray Coating Method
2003 年 123 巻 12 号 p. 588-589
詳細
2003 年 123 巻 12 号 p. 588-589
This paper reports a new proposal on PZT film formation technology both on planar and non-planar surface with use of spray coating method. SEM observation shows the film formation on non-planar and edged surface of Si-wafer. Ferroelectric properties is confirmed with ferroelectric test system. Several kinds of applications of this method is also shown for the future target.
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