抄録
A superior electrochemical gas sensor has been developed by using a novel gas diffusion membrane consisting of carbon powder and poly-fluorocarbon for the detection of toxic gases. The gas permeability of the gas diffusion membrane depends on the poly-fluorocarbon composition in the membrane. With a decrease of the poly-fluorocarbon composition in the membrane, the electrochemical gas sensor shows high sensitivity for the detection of toxic gases, such as arsine and silane.