抄録
Two-photon microstereolithography can provide complicated three-dimensional microstructures with nearly 100 nm resolution in three-dimensions. This technique is one of promising methods to produce disposable functional biochips. However it needs a long time to fabricate thick microstructures owing to its high depth resolution. To solve this problem, we tried to control the thickness of microstructures by changing the numerical aperture of an objective lens and input laser power. As a result, we succeeded in fabricating microgears whose thickness is from 0.59μm to 1.57μm. We also demonstrated that the optical torque of the thick microgear was higher than that of the thin microgear. Additionally the microgear was stably rotated by the optimization of the clearance between the gear and the shaft. Finally we fabricated engaged cogwheels by making each microgear at different height to avoid sticking of the two microgears.
