電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
特集研究開発レター
電解液を用いた容量型水平センサの試作と評価
森永 秀樹松本 佳宣
著者情報
ジャーナル フリー

2009 年 129 巻 12 号 p. 469-470

詳細
抄録
In this study, electrolyte-based level sensor has been fabricated on printed circuit board and evaluated with charge balanced C-V converter fabricated by 0.35μm CMOS process. Sector pattern sensor electrodes were fabricated and polydimethylsiloxane was used as package material. Propylene carbonate was injected in the bumpy surface sensor cavity of 10mm diameter and 2mm height, output voltage was changed with the inclination angle without the effect of vibration.
著者関連情報
© 電気学会 2009
前の記事 次の記事
feedback
Top