抄録
In this study, electrolyte-based level sensor has been fabricated on printed circuit board and evaluated with charge balanced C-V converter fabricated by 0.35μm CMOS process. Sector pattern sensor electrodes were fabricated and polydimethylsiloxane was used as package material. Propylene carbonate was injected in the bumpy surface sensor cavity of 10mm diameter and 2mm height, output voltage was changed with the inclination angle without the effect of vibration.