2022 年 142 巻 5 号 p. 85-90
In our previous work, it has been shown that an electrostatic tactile display using fluoropolymer (Cytop) as an insulating film can present changes in friction by electrostatic force at less than 100 V. However, there are some issues in terms of electrical and mechanical durability. In this study, a device using a polyimide film as the insulating film, which has higher breakdown voltage and mechanical strength was fabricated and characterized. As a result, it is shown that no dielectric breakdown occur even at higher voltages and the durability against contact operation can be improved.
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