波長950 nm帯でSU-8光導波路と結合するモードの空間分離可能なウェッジ型マイクロディスクキャビティの印刷作製の検討

抄録

To demonstrate the spatial separation of special modes in wedge-shaped microdisk cavities, our group have been focused on the coupling with waveguides at wavelengths of 1550 nm and 950 nm. In this study, the mode of microdisk that is coupled to a SU-8 waveguide at 950 nm was analyzed. Mode position is simulated to determine the printing position of microdisks. From the simulation result, thickness of microdisk which mode is exist was calculated. The mode thickness at 1550 nm is 970 nm, and the thickness at 950 nm is 900 nm. It confirmed the occurrence of spatial separation of modes.