抄録
This paper presents a newly developed 3-axis controlled Fast Tool Servo (FTS) machining system for ultraprecision machining, which is driven in synchronization with the rotation of the workpiece fixed on the rotary table. The 3-axis controlled FTS unit can drive the cutting tool along the arbitrary cutter path in the space by controlling the motions of three piezoelectric actuators arranged in three axes of the orthogonal coordinates. The three directional motions are measured with use of three capacitive-type proximeters and the motion signals are fed back to the controlling computer in order to guarantee the required tool paths. The FTS machining system can be applied to machine sculptured surfaces, micro lens arrays etc. A mold with cylindrical surface was machined with the developed system, and the obtained form accuracy was 0.22 μm P-V.
