微小モジュール歯車の歯形精度測定への光切断法の応用(第3報)

画像取得における偏光特性利用の効果と測定誤差の理論的考察

抄録

This study aims to develop an accuracy measurement method of the tooth profile error of minute module gears. The principle of measurement is based on the optical cutting method. This report describes a measuring system employing a linearly polarized laser beam as a light source and polarizers. Among the light reflecting from the surface, the depolarized component of the light scattered from the surface is detected while the specularly reflected light is eliminated by using a polarizer. Because this technique leads to the effect of equalizing the intensity of light reflecting from the measuring tooth surface, the noise factors caused by the glaring light reflecting from the tooth crest can be eliminated. Moreover, calculating geometrically the optical cutting images in consideration of setup errors in optical axes, deformations involved in the images obtained by the CCD camera become clear.