1999 年 65 巻 6 号 p. 835-839
Force information is indispensable to accurate control of tools in precise machining. However, usual force sensors may disturb a machining system because of their low rigidity. The authors have proposed an active force sensor which has an actuation capability and detection capabilities for force and displacement. This sensor can improve its rigidity by position control with the actuator. In this paper, structure and mechanical characteristics of the active force sensor are analyzed. Feedback control system to change compliance of the sensor is developed. With the sensor and the control system, arbitrary compliance control, including position control and force control, is achieved.