抄録
This paper deals with a non-contact transportation system using an ultrasound wave levitation phenomenon. It is the purpose of this paper to realize the position control using low frequency. First, active wave control is introduced for oscillating the beam at a low frequency, and am amplitude and a standing ratio is analyzed. Then a non-contact transportation device using four vibration sources operating at two frequencies is presented, which oscillates the beam at a high frequency by Langevin transducers and at a low frequency by PZT elements. Finally, experiment of the position control using PID control is carried out, demonstrating the validity of the proposed method.v
