抄録
Steam-water mixed sprays can remove thin polymer or metal films on substrates. However, the detailed mechanism remains unclear. One possible mechanism is the temperature change in the film due to the mixed spray because the film and substrate typically have different linear expansion coefficients. Here, we control the initial temperature of aluminum films deposited on glass using a Peltier device and apply steam-water and air-water mixed sprays to examine the film removal performance. We also measure the surface temperature change using a thin thermocouple. Steam-water mixed spray can remove the film, but air-water mixed spray cannot, although comparable temperature changes occur in both methods. A long-duration irradiation test reveals that the steam-water mixed spray can remove a relatively thick film despite an almost constant surface temperature. Thus, surface temperature changes may have little effect on film removal by steam-water mixed sprays.
