抄録
This paper aims to evaluate small diameter diamond grinding wheel surface topography in ultrasonic assisted grinding (UAG) process quantitatively and demonstrate the effect of the topography on grinding characteristics. In this study, a scanning electron microscope with four electron probes (3D-SEM) was used for 3D observations of the wheel working surface in on-surface UAG process. From these results, good wheel surface maintained in UAG process have been evaluated quantitatively by the number and the area of cutting edges. Additionally, these results are closely concerned to the low grinding forces and manufacturing of mirror workpiece surface easily, respectively.