抄録
This paper describes the comparison with the experimental flying heights and the simulated flying heights, which were calculated by using the Linearized Boltzmann equation and the conventional modified Reynolds equations. The experiments were measured under the ambient pressure from atmospheric pressure to 6.7x(10)^<-3> MPa. The Linearized Boltzmann equation were almost the same as to the experimental results from the high spacing range to the low spacing range of 10nm. At the slider spacing of 10nm, it was confirmed that the difference between the experimentally measured results and the calculated results of the Linearized Boltzmann equation was less than 5%.
