抄録
This paper describes the multi-directional switching valve chip with the built-in actuator. The previous model utilized the solenoid on the outside. The user required to assemble the switching valve chip and the solenoid into the holder. In order to enhance the user-friendliness, we developed the multiple-directional switching valve chip incorporating two kind of the micro actuator respectively. The circular arc solenoid and the electromagnetic force actuator were developed as a built-in actuator. The performances of each built-in actuators were evaluated experimentally. Moreover, each multi-directional switching valve chips with built-in actuators were fabricated using the hybrid micro stereo lithography. The switching valve chip is useful for various kinds of micro chemical devices and μ-TAS.
