抄録
In this study, an ultrasonic motor used in a cryogenic temperature condition has been fabricated and evaluated. To increase the rotation speed compare to a previous cryogenic ultrasonic motor, the bolt-clamped Langevin type transducer was designed. The PZT was placed at the anti-node of the bending vibration. The transducer was designed to have high vibration speed by using a finite element analysis. The diameter and the length of the motor are 22mm and 30.5mm. The rotation speed was 422rpm at 4.5K when the applied voltage was 50V_<p-p>. We have realized three times higher rotation speed than that of the previous motor.
