解説
真空に関連の深い分子の特性
2016 年 59 巻 6 号 p. 145-155
詳細
2016 年 59 巻 6 号 p. 145-155
Creating a vacuum is to pump gas molecules in a vacuum chamber. Since outgassing properties of chamber walls and vacuum parts are of critical importance for vacuum technology, knowledge on the interaction of molecules with solid surfaces is required. We review properties of typical molecules familiar to vacuum technology and their interaction with well-defined solid surfaces.
