KONA Powder and Particle Journal
Online ISSN : 2187-5537
Print ISSN : 0288-4534
ISSN-L : 0288-4534
Review
Particle-precipitation Aided CVD [Translated]
Hiroshi KomiyamaHisatsugu Kaji
Author information
JOURNAL OPEN ACCESS

1987 Volume 5 Pages 50-58

Details
Abstract
This report was originally printed in Monthly Semiconductor World, 8, 42-49 (1986) in Japanese, before being translated into English with the permission of the editorial committee of the Press Journal Co., Ltd., Japan.
Content from these authors

This article is licensed under a Creative Commons [Attribution 4.0 International] license.
https://www.kona.or.jp/jp/journal/info.html
https://creativecommons.org/licenses/by/4.0/
Previous article Next article
feedback
Top