高機能炭素材料の開発とその応用

抄録

Graphite or carbon material is apt to be used under a hard chemical or physical condition. Stability and long life are requested for it. The investigation of the reaction mechanism at the interface of graphite is important to develop a new grade. In this presentation, two examples of the industrial application were chosen to explain above mentioned features. One is a graphite beam aperture for ion implantation in silicon technology and the other is a carbon electrode for the production of fluorine.