周波数変調されたQスイッチYAGレーザーのセラミックス加工への応用

抄録

We performed controlled processing on silicon nitride and carbide, using laser pulses from an A/O Q-switched continuously pumped Nd: YAG laser. The removal process can be carried out by overlapping many drilled holes with single pulses at a Q-switch frequency which does not exceed 5 kHz. The experimental values obtained from processing depth and surface roughness were in agreement with the values calculated on the assumption that the shape of the hole is a frustum of a cone. The removal amount per single Q-switch pulse is approximately pro-portional to the pulse energy with the constant of 2_??_4×10^-3 mm³/J for silicon nitride. As a result of this experiment, it is found that the scanning method with a frequency modulated Q-switch Nd: YAG laser should be a successful method for ceramics as well. Pictures of the processed samples are also shown.